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Springer Series in
materials science
142
Springer Series in
materials science
Editors:
R. Hull C. Jagadish R.M. Osgood, Jr.
J. Parisi Z. Wang H. Warlimont
The Springer Series in Materials Science covers the complete spectrum of materials physics,
including fundamental principles, physical properties, materials theory and design. Recognizing
the increasing importance ofmaterials science in future device technologies, the book titles in this
series ref lect the state-of-the-art in understanding and controlling the structure and properties
of all important classes of materials.
Please view available titles in
Springer Series in Materials Science
Lars Rebohle
Wolfgang Skorupa
Rare-Earth Implanted
MOS Devices
for Silicon Photonics
Microstructural, Electrical
and Optoelectronic Properties
With 121 Figures
123
Dr. Lars Rebohle
Dr. Wolfgang Skorupa
Forschungszentrum Dresden-Rossendorf e.V.
Institut fur Ionenstrahlphysik und Materialforschung
Bautzner Landstraße 400, 01328 Dresden, Germany
E-mail: l.rebohle@fzd.de, w.skorupa@fzd.de
Series Editors:
ProfessorRobertHull
University of Virginia
Dept. of Materials Science and Engineering
Thornton Hall
Charlottesville, VA 22903-2442, USA
Professor Chennupati Jagadish
Australian National University
Research School of Physics and Engineering
J4-22, Carver Building
Canberra ACT 0200, Australia
Professor Jurgen Parisi
Universitat Oldenburg, Fachbereich Physik
Abt. Energie- und Halbleiterforschung
Carl-von-Ossietzky-Straße 9–11
26129 Oldenburg, Germany
Dr. Zhiming Wang
University of Arkansas
Department of Physics
835W.DicknsonSt.
Fayetteville, AR 72701, USA
ProfessorR.M.Osgood,Jr.
Microelectronics Science Laboratory
Department of Electrical Engineering
Columbia University
Seeley W. Mudd Building
New York, NY 10027, USA
Professor Hans Warlimont
DSL Dresden Material-Innovation GmbH
Pirnaer Landstr. 176
01257 Dresden, Germany
Springer Series in Materials Science ISSN 0933-033X
ISBN 978-3-642-14446-2
e-ISBN 978-3-642-14447-9
DOI 10.1007/978-3-642-14447-9
SpringerHeidelbergDordrechtLondonNewYork
LibraryofCongressControlNumber: 2010938144
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